Stainless Steel Pre-Scrubber System

Manuflex Limited is a major supplier of bespoke applications for clients with international involvement in the semi-conductor industry.

This example was built for a client whose customers include the compound semi-conductor industry worldwide. The stainless steel pre-scrubber was built to go inline with and before a stainless steel scrubbing system.

It is the most advanced wet scrubbing system in the world for the abatement of waste gases such as Arsine and Phosphine, and is installed in Europe and the Far East, particularly Taiwan.

This pre-scrubber shown removes oils and alkalis before they enter the main scrubber body. The high specification pre-scrubber stainless steel system was ordered by the client for the control of any possible fire hazard and is integral to the operational production process.

Features of this unit include

  • 316 material
  • Viewing windows both sides
  • Interconnecting removable pipe assembly
  • 4” underside outlet
  • 11 off top mounted mixing chambers
  • 8 flanged inlets